Optical Encoder for Ultra-High Vacuum (UHV) environments

RESOLUTE™ UHV i

Related Topics:

Related Suppliers

The RESOLUTE™ UHV is the latest ultra-high vacuum compatible readhead from Renishaw, offering true-absolute position feedback, sub-micron accuracy and resolutions to 1 nm for both linear and rotary applications, the company states. The new range of RESOLUTE UHV encoders are constructed from clean vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA) making them suitable for high performance, semiconductor and scientific applications requiring vacuum compatibility to 10-10 Torr.
 
According to the company, like the standard range of RESOLUTE true-absolute encoders, the new ultra-high vacuum variant determines position immediately upon switch-on, without the need for any movement or battery back-up. Instant commutation means that axes are immediately under complete control after power loss, thus eliminating risks of unchecked movements or collisions; an advantage that is essential in applications, such as wafer handling, where safe extraction of high value wafers is critical.
 
Safety is assured by a built-in separate and independent position-checking algorithm. This actively checks every reading, ensuring any potential problem is flagged long before it reaches the controller. RESOLUTE UHV uses pure serial communications with CRC (cyclic redundancy check) which eliminates the need for auxiliary 1 Vpp signals, offers higher noise immunity and detects data corruption. Available with a wide range of serial protocols, including BiSS, FANUC, Mitsubishi and Panasonic, RESOLUTE UHV is compatible with industry standard controllers.
 
RESOLUTE UHV systems are available for both linear and rotary position feedback, and because the RESOLUTE system uses a single track scale code, each installation is compact with wide set-up tolerances for quick, easy fitment and long-term operation. All scale formats are coating-free and can be subjected to specialist cleaning and degreasing if required.
 
Designers can choose from a variety of linear scales in either stainless steel or ZeroMet™ low thermal expansion alloy with accuracy to better than ±1 µm on lengths up to 1.13 m. Mounting can be either self-adhesive, mechanical or track-mounted, with even the self-adhesive scales having proven clean RGA spectra. Stainless steel rotary rings feature large through-holes and patented taper mounting for quick, easy and precise adjustment of eccentricity, while minimizing shaft preparation costs.

Editor's Pick

Seeing, Learning, Sharing at Makino Die/Mold Expo

What do you gain by attending events like the Makino Die/Mold Expo that was held last week at the company’s Technology Center in Auburn Hills, Michigan? I asked three of the moldmakers I met there to share their personal takeaways.